High-k Gate Dielectrics for CMOS Technology

**bacsikha** Thu Mar 06, 2014 8:21 pm

A state-of-the-art overview of high-k dielectric materials for advanced field-effect transistors, from both a fundamental and a technological
viewpoint, summarizing the latest research results and development solutions. As such, the book clearly discusses the advantages of these
materials over conventional materials and also addresses the issues that accompany their integration into existing production technologies.

Aimed at academia and industry alike, this monograph combines introductory parts for newcomers to the field as well as advanced sections
with directly applicable solutions for experienced researchers and developers in materials science, physics and electrical engineering.

Product Details

Hardcover: 590 pages
Publisher: Wiley-VCH; 1 edition (October 15, 2012)
Language: English
ISBN-10: 3527330321
ISBN-13: 978-3527330324